Complex study of titanium nano-films prepared by magnetron sputtering

Authors:
V. A. Matveev, N. K. Pleshanov, O. V. Gerashchenko, V. Yu. Bayramukov
The year of the publication:
2014
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques N 5 vol. 8 991 - 996
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