Silicon device engineering by intrinsic point defect control
Authors:
Sobolev N.A., Vyzhigin Yu.V., Gresserov B.N., Sheck E.I., Kurbakov A.I., Rubinova E.E., Trunov V.A.
Authors from CMD:
The year of the publication:
1991
Journal:
Solid State Phenomena
vol. 19/20
169-174