Investigation of the defects of thermotreatment in silicon by the method of diffuse scattering of high-energetic gamma quanta.
Authors:
Kurbakov A.I., Rubinova E.E., Sobolev N.A., Trunov V.
Authors from CMD:
The year of the publication:
1991
Journal:
Electronic Technic. Materials
N 261
vol. B 7
9-11