Investigation of the defects of thermotreatment in silicon by the method of diffuse scattering of high-energetic gamma quanta.
Авторы:
Kurbakov A.I., Rubinova E.E., Sobolev N.A., Trunov V.
Авторы из ОИКС:
Год публикации:
1991
Журнал:
Electronic Technic. Materials
N 261
vol. B 7
9-11