Investigation of the defects of thermotreatment in silicon by the method of diffuse scattering of high-energetic gamma quanta.

Авторы:
Kurbakov A.I., Rubinova E.E., Sobolev N.A., Trunov V.
Авторы из ОИКС:
Год публикации:
1991
Журнал:
Electronic Technic. Materials N 261 vol. B 7 9-11
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