Characterization of vacancy-related defects introduced during silicon heat treatment by DLTS and gamma-ray diffraction techniques
Авторы:
Sobolev N.A., Shek E.I., Kurbakov A.I., Rubinova E.E., Sokolov A.E.
Авторы из ОИКС:
Год публикации:
1996
Журнал:
Appl. Phys.
vol. A62
259-262