Characterization of vacancy-related defects introduced during silicon heat treatment by DLTS and gamma-ray diffraction techniques

Authors:
Sobolev N.A., Shek E.I., Kurbakov A.I., Rubinova E.E., Sokolov A.E.
The year of the publication:
1996
Journal:
Appl. Phys. vol. A62 259-262
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